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    Changing Inspection Landscape: KLA-Tencor's Voyager 1015 and Surfscan SP7

      Risto Puhakka

    KLA-Tencor's Voyager 1015 and Surfscan SP7 provide solutions for advanced nodes in logic and memory as well as EUV transition

    Views: 2735
    Domain: Electronics
    Category: Semiconductors
    The Chip Insider®

    August 2, 2018

    Equipment & Emerging Markets
    Changing Inspection Landscape: KLA-Tencor’s
    Voyager™ 1015 and Surfscan® SP7
    • Advanced Node Defect Detection Challenges
    • Lithography Cost Increases Demand for Inspection

    • Two New Inspectors for Advanced IC Manufacturing
    • Voyager 1015
    • Surfscan SP7

    • New technologies and solutions ... See more