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    Corrosion-resistant Mg-based multilayer coatings for sources >25nm

      Regina Soufli
     Aug 14, 2018

    Atmospheric corrosion has prevented the use of Mg/SiC multilayers in applications requiring good lifetime stability, such as EUV laser sources and solar physics.

    Important Tags: EUVL Workshop, LLNL facilities, EUV laser sources
    Views: 1659
    Domain: Electronics
    Category: Semiconductors

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