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    M&NEMS Platform for Ultra-Small Low-Power Low-Cost Sensors

      Hughes Metras
     Nov 9, 2015
    Description:

    M&NEMS Platform for Ultra-Small Low-Power Low-Cost Sensors:- Why and how do we miniaturize inertial sensors?- A global interest for size reduction: easier system integration and cost reduction. But technical issues aris from size reduction. M&NEMS approach: integrating 2 different thicknesses- Thick layer (10-20) for the seismic mass (MEMS), Thin layer (250nm) for piezoresistive dectection gauges (NEM). A generic plateform for sensor fusion- Miniaturization; Generics processes, moduleing and readout electronics; VLSI, first (ongoing industrial transfer (non-exclusive licensing) to Tronics (9-axis). M&MEMS: How Does IT Work. M&MEMS: 3-Axis Accelerometer: Main Charactristics(first demonstrator designed with consumer specs)- Typical size of 3-axis chipa: 1mm2,range: 10 or 50 G, Dynamic range: 5000. M&MEMS: 3-Axis Gyroscope: Main Characteristics (first demonstrator designed with consumer specs)- Typical size of 3-axis chip <3mm2(2mm2 for the electromechanical part), Resolution: 0.002 /s/Hz (limited by readout electronic noise).first demonstrator designed with consumer specs). M&NEMS: 3 Axis Magnetometer: Main Characteristics-(first demonstrator designed with consumer specs)- Typical size of 3-axis chip:1mm2, Low power consumption (integrated permanent magnet), Resolution: 100 nT/ Hz Linearity range 4.5mT.

    Important Tags: M&NEMS, M&NEMS Platform, Ultra-Small Low-Power, Low-Cost Sensors
    Views: 1570
    Domain: Electronics
    Category: Semiconductors


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