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    MEMS and NEMS Plasma Etch and Deposition

      Michelle Bourke
     Nov 28, 2011

    Plasma Etch and Deposition for MEMS and NEMS Applications, MEMS Technologies and Applications, Bosch or Gas Chopping Process Cryo Etch, Atomic Layer Deposition for MEMS. Plasma Technologies Defined Markets - Semiconductor Electronics, Displays and Lighting, Customer Service, Micro Electro Mechanical Systems (MEMS), Research. MEMS Technologies and Applications, Enabling Device Manufacture - Etch and Deposition, Inductively coupled plasma (ICP) etch and deposition Reactive ion etching (RIE), Plas

    Important Tags: MEMS, NEMS, Plasma Etch, Deposition, MEMS Etching
    Views: 5165
    Domain: Electronics
    Category: Semiconductors

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