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    Optical Characterization of MEMS - Current Challenges & Recent Developments

      Heinrich Steger
     May 29, 2017

    Challenges in MEMS development and the role of Measurement Modelling of dynamic behavior. Models and Simulation (FEM) are providing good first estimations and impressions Verification of dynamic behavior. Results for dynamic behavior have to be validated by vibration measurement data IP, OOP, 3D Measurement of the geometry. Resonance frequencies are depending on geometry parameters

    Important Tags: MEMS, RF-MEMS Switches, Vibration Measurement of SAW Devices, 3D Motion Analysis
    Views: 898
    Domain: Electronics
    Category: Semiconductors

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