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    Optical Lithography's Evolution

      Steve Renwick
     Aug 23, 2012
    Description:

    Continual Evolution of Optical Lithography - Optical litho progress Resolution, It's not just resolution more ITRS requests. Control requirements, i.e. CDU and Overlay, can individually limit the evolution of litho technology, Where the industry wants to go, Where we are now, How to keep it flying, Printing really small features, Negative Tone photoresist model using lines.

    Important Tags: Optical Lithography's Evolution, Litho Evolution
    Views: 3283
    Domain: Electronics
    Category: Semiconductors


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