Certify Alexametrics gif

    Storage Ring EUV Light Source Based on Steady State Microbunching Mechanism

      Tsinghua University
     Aug 18, 2018
    Description:

    An initial task force has been established in Tsinghua University to design an electron storage ring to generate kW level EUV radiation based on the steady state microbunching (SSMB) mechanism [1].

    Important Tags: EUV Light Source, Microbunching Mechanism, EUV Lithography
    Views: 1728
    Domain: Electronics
    Category: Semiconductors


    You may like this also: