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    Storage Ring EUV Light Source Based on Steady State Microbunching Mechanism

      Tsinghua University
     Aug 18, 2018

    An initial task force has been established in Tsinghua University to design an electron storage ring to generate kW level EUV radiation based on the steady state microbunching (SSMB) mechanism [1].

    Important Tags: EUV Light Source, Microbunching Mechanism, EUV Lithography
    Views: 1728
    Domain: Electronics
    Category: Semiconductors

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