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    The Role of Metrology And Inspection In Semiconductor Processing

      Mark Keefer, Rebecca Pinto, Cheri Dennison, James Turlo
     Sep 21, 2017
    Description:

    Metrology and inspection systems can be broadly separated into three main classifications by application: critical dimension (CD) and overlay measurements, particle and pattern defect detection and thin film parameter measurement (such as resistivity, thickness, and stress). The typical processing steps and metrology and inspection equipment used to monitor and/or control them.

    Important Tags: Metrology, Semiconductor Processing, Semiconductor, Semiconductor Manufacturing Process
    Views: 2335
    Domain: Electronics
    Category: Semiconductors


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