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    Thin Film Process Technology

      授課教師:黃俊杰
     Oct 28, 2010
    Description:

    Semiconductor Manufacturing Technology, Semiconductor Devices Physics and Technology, Thin Film Process, Dielectric Deposition, Polysilicon Deposition, Thermal Processes in IC Fabrication, Thin Film Deposition, Scope of work of vacuum pump, air force under different pressure, Equilibrium vapor pressure of the gas, Evaporator vacuum system, Thermal Evaporation System, Electron beam evaporation system, Evaporation characteristics, Sputtering system.

    Important Tags: Semiconductor Manufacturing Technology, Semiconductor Devices Physics, Polysilicon Deposition
    Views: 3697
    Domain: Electronics
    Category: Semiconductors


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