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    Ultra low down force of CMP - Magic hand process

      Manabu Tsujimura
     Oct 12, 2010
    Description:

    Paradigm shift 20 How to survive ICe Age, What is the Ice Age, How about IC world, Technology is still boiling in the ICe Age, Food chain now, Good news from DQ, Good news from Silicon wafer, Key words of Paradigm Shift 45, Key words of Paradigm Shift 45, Difficulty challenges in Interconnect Now, Challenges by ITRS interconnect Group, Seven See challenges, Ultra-Low-Down Force is required in Low k CMP.

    Important Tags: Paradigm shift, Ice Age, IC world, Food chain
    Views: 2053
    Domain: Electronics
    Category: Semiconductors


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